17 September 2015 Development of achromatic full-field hard x-ray microscopy with two monolithic imaging mirrors
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Abstract
Advanced Kirkpatrick-Baez mirror optics using two monolithic imaging mirrors was developed to realize an achromatic, high-resolution, and a high-stability full-field X-ray microscope. The mirror consists of an elliptical section and a hyperbolic section on a quartz glass substrate, in which the geometry follows the Wolter (type I) optics rules. A preliminary test was performed at SPring-8 using X-rays monochromatized to 9.881 keV. A 100-nm feature on a Siemens star chart could be clearly observed.
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S. Matsuyama, H. Kino, S. Yasuda, Y. Kohmura, H. Okada, T. Ishikawa, K. Yamauchi, "Development of achromatic full-field hard x-ray microscopy with two monolithic imaging mirrors", Proc. SPIE 9592, X-Ray Nanoimaging: Instruments and Methods II, 959208 (17 September 2015); doi: 10.1117/12.2188583; https://doi.org/10.1117/12.2188583
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