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5 August 2015 A study on deformable mirrors control and error analysis
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A four-group stabilized zoom lens design of two focal-length-variable elements was discussed in our early work. The focal-length of the zoom system could be adjusted by tuning the surface shape of focal-length-variable element. In this paper, we propose to use the deformable mirror (DM) as the focal-length-variable device, and then we need to control the DM to forming the required surface shape and analyze the errors between actual surface and theoretic surface. This lays the foundation for analyzing the focusing zoom errors of the stabilized zoom lens in the zoom process. This paper firstly introduces a DM flatten method applied for using OKO Technologies’ Piezoelectric Deformable Mirror (PDM) and analyzes the high order errors of flattened surface with the help of ZYGO interferometer. Then we study the method of DM control to form sphere surfaces with different curvature. The analyses of the high order error of the actual surface and the measurement of the curvature range of the sphere surface are also included in this paper.
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Heng Li, Xuemin Cheng, Qun Hao, and Fan Fan "A study on deformable mirrors control and error analysis", Proc. SPIE 9618, 2015 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments, 961812 (5 August 2015);

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