The centering and leveling adjustment and control technology for the ultra-precision turntable

Yanrong Tian; Yun Wang; Longxiao Wang; Weirui Zhao

doi:10.1117/12.2197530

5 August 2015 The centering and leveling adjustment and control technology for the ultra-precision turntable

Yanrong Tian, Yun Wang, Longxiao Wang, Weirui Zhao

Proceedings Volume 9618, 2015 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments; 96181A (2015) https://doi.org/10.1117/12.2197530
Event: International Conference on Optical Instruments and Technology 2015, 2015, Beijing, China

Abstract

In order to realize the centering and leveling adjustment in large aperture spherical and aspheric surface shape measurement, by combining with the aerostatic bearing rotary shaft, working platform, high performance servo motor, photoelectric encoder, the micro displacement actuator of XYZ axis, sensor and Renishaw circular grating ,a set of fast and ultra-precision centering and leveling adjustment system is developed .The system is based on large range of air lubrication technology for high precision aerostatic bearing turntable, using the principle of three point supporting method, and the driving of tens nanometer resolution are provided by a piezoelectric micro displacement actuator. To realize the automatical centering and leveling adjustment in the large aperture spherical and aspheric surface shape measurement system, a software control program is designed with VC++. Through experimental test: centering adjusting operation can eventually converges to 0.5μm, leveling adjusting operation can eventually converges to 0.2 ", the time of adjusting can be less than 120 s. The experimental results shows that, compared with the previous system, the structure of the developed measurement and control system is more simple, more flexible, it can meet the demands of high precision, high resolution, large adjusting range, no friction, easy to drive, and high bearing stiffness etc in eccentric adjusting operation of optical precision measurement well.

Citation Download Citation

Yanrong Tian, Yun Wang, Longxiao Wang, and Weirui Zhao "The centering and leveling adjustment and control technology for the ultra-precision turntable", Proc. SPIE 9618, 2015 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments, 96181A (5 August 2015); https://doi.org/10.1117/12.2197530

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