Infrared absorption modeling of VOx microbolometer

Mehdi Aggoun; Jianliang Jiang; M. Khalid Khan

doi:10.1117/12.2192816

10 August 2015 Infrared absorption modeling of VOx microbolometer

Mehdi Aggoun, Jianliang Jiang, M. Khalid Khan

Proceedings Volume 9620, 2015 International Conference on Optical Instruments and Technology: Optical Sensors and Applications; 96200O (2015) https://doi.org/10.1117/12.2192816
Event: International Conference on Optical Instruments and Technology 2015, 2015, Beijing, China

Abstract

The absorption model plays an important role in the design of the microbolometer structure regarding the determination of the optimum thickness of the structure layers. Moreover, the infrared absorption depends on the wavelength of the radiation and the material properties. In this paper, we presented an Infrared absorption model with absorption coefficient of 96% at maximum absorption wavelength of 9.89μm which is very close to the expected value 10μm. This model was established by using MATLAB so that the simulation of the infrared absorption of the VOx microbolometer could be accomplished. In order to confirm the role of this modeling in the design of the device structure, comparison with other structures is also studied in this paper.

Citation Download Citation

Mehdi Aggoun, Jianliang Jiang, and M. Khalid Khan "Infrared absorption modeling of VOx microbolometer ", Proc. SPIE 9620, 2015 International Conference on Optical Instruments and Technology: Optical Sensors and Applications, 96200O (10 August 2015); https://doi.org/10.1117/12.2192816

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