10 August 2015 Infrared absorption modeling of VOx microbolometer
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Proceedings Volume 9620, 2015 International Conference on Optical Instruments and Technology: Optical Sensors and Applications; 96200O (2015) https://doi.org/10.1117/12.2192816
Event: International Conference on Optical Instruments and Technology 2015, 2015, Beijing, China
Abstract
The absorption model plays an important role in the design of the microbolometer structure regarding the determination of the optimum thickness of the structure layers. Moreover, the infrared absorption depends on the wavelength of the radiation and the material properties. In this paper, we presented an Infrared absorption model with absorption coefficient of 96% at maximum absorption wavelength of 9.89μm which is very close to the expected value 10μm. This model was established by using MATLAB so that the simulation of the infrared absorption of the VOx microbolometer could be accomplished. In order to confirm the role of this modeling in the design of the device structure, comparison with other structures is also studied in this paper.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mehdi Aggoun, Mehdi Aggoun, Jianliang Jiang, Jianliang Jiang, M. Khalid Khan, M. Khalid Khan, } "Infrared absorption modeling of VOx microbolometer ", Proc. SPIE 9620, 2015 International Conference on Optical Instruments and Technology: Optical Sensors and Applications, 96200O (10 August 2015); doi: 10.1117/12.2192816; https://doi.org/10.1117/12.2192816
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