Paper
5 August 2015 Effect of ambient temperature on the measurement accuracy of Shack-Hartmann wavefront sensor
Author Affiliations +
Proceedings Volume 9621, 2015 International Conference on Optical Instruments and Technology: Advanced Lasers and Applications; 96210H (2015) https://doi.org/10.1117/12.2193109
Event: International Conference on Optical Instruments and Technology 2015, 2015, Beijing, China
Abstract
The centroid estimation, wavefront reconstruction and environment (typically temperature) are the main error sources of the Shack-Hartmann wavefront sensor (SHWS). In this paper, theoretical and experimental studies are conducted to analyze the effect of ambient temperature on the measurement accuracy of SHWS. The spot arrays corresponding to ambient temperature varied from 20.5 to 24 degrees are obtained by using the thermal analysis features in ZEMAX. The wavefronts are then reconstructed by home-made software from these spot arrays. By using the wavefront diffracted by a single mode optical fiber and the SHWS, the experiment setup is built to verify the results obtained by theoretical analysis. The results obtained by theoretical analysis and experiments are coincident well. The variation of the wavefronts measured by SHWS will be smaller than 0.06 nm RMS if the ambient temperature variation is controlled within 0.1 degree. The range of temperature within ±2 degrees, the max wavefront deviation is 2.12 nm. This research will be of guiding significance to ambient temperature control in high precision wavefront error metrology by using SHWS.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Qingbin Meng, Yuejing Qi, Zengxiong Lu, and Jiani Su "Effect of ambient temperature on the measurement accuracy of Shack-Hartmann wavefront sensor", Proc. SPIE 9621, 2015 International Conference on Optical Instruments and Technology: Advanced Lasers and Applications, 96210H (5 August 2015); https://doi.org/10.1117/12.2193109
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Cited by 2 patents.
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KEYWORDS
Wavefronts

Temperature metrology

Wavefront sensors

Charge-coupled devices

Wavefront reconstruction

Zemax

Sensors

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