Geometric error detection and calibration in laser trackers

Zili Zhang; Dabao Lao; Dengfeng Dong; Weihu Zhou

doi:10.1117/12.2193366

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7 August 2015 Geometric error detection and calibration in laser trackers

Zili Zhang, Dabao Lao, Dengfeng Dong, Weihu Zhou

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Proceedings Volume 9623, 2015 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems; 96230G (2015) https://doi.org/10.1117/12.2193366
Event: International Conference on Optical Instruments and Technology 2015, 2015, Beijing, China

Abstract

Geometric errors in laser trackers such as light offset and transit tilt have essential influence on the system measurement errors. Thus error detection and calibration are very important for producers and customers to execute error compensation. Different methods are developed to detect and calibrate errors. However, the commonly used methods such as length measurement and two-face measurement are sensitive to several misalignments which cannot calibrate errors directly and separately. In this paper a series of methods for detecting and calibrating geometric errors such as mirror tilt, beam tilt and transit tilt were presented which can calibrate geometric errors individually and precisely. The mirror tilt could be detected with the help of two autocollimators and one polygon. Then the beam tilt and offset errors were calibrated using a CCD camera and condenser lenses. Finally the transit tilt error was calibrated using a gradient and a vertical plane. Experiments and error assessment were executed to show that the accuracy of the calibration methods can meet the user’s demand.

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Zili Zhang, Dabao Lao, Dengfeng Dong, and Weihu Zhou "Geometric error detection and calibration in laser trackers", Proc. SPIE 9623, 2015 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 96230G (7 August 2015); https://doi.org/10.1117/12.2193366

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