You have requested a machine translation of selected content from our databases. This functionality is provided solely for your convenience and is in no way intended to replace human translation. Neither SPIE nor the owners and publishers of the content make, and they explicitly disclaim, any express or implied representations or warranties of any kind, including, without limitation, representations and warranties as to the functionality of the translation feature or the accuracy or completeness of the translations.
Translations are not retained in our system. Your use of this feature and the translations is subject to all use restrictions contained in the Terms and Conditions of Use of the SPIE website.
12 August 2015Design and fabrication of sub-wavelength metal grating polarizer in visible broadband
In this paper, a sub-wavelength metal grating polarizer at visible region is designed by Finite Difference Time Domain (FDTD) method. We have analyzed the effects of the period, the thickness of metal layer and the duty cycle on the performance of the metal grating polarizer. Simulation results show that in order to increase the metal grating transmissivity and extinction ratio and to reduce the angle sensitivity (±30°), the period should be less than 200 nm; Therefore, the structure with 180nm period and an 120nm Al layer is chosen, and the transmission efficiency and extinction ratio is more than 75% and 25dB respectively. Finally, a prototype of the metal grating has been fabricated by holographic-immersion lithography and ion beam etching.
Yang Zhou,Quan Liu, andJianhong Wu
"Design and fabrication of sub-wavelength metal grating polarizer in visible broadband", Proc. SPIE 9624, 2015 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication, 96240B (12 August 2015); https://doi.org/10.1117/12.2190505
The alert did not successfully save. Please try again later.
Yang Zhou, Quan Liu, Jianhong Wu, "Design and fabrication of sub-wavelength metal grating polarizer in visible broadband," Proc. SPIE 9624, 2015 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication, 96240B (12 August 2015); https://doi.org/10.1117/12.2190505