12 August 2015 The fabrication of the holographic echelle gratings
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Proceedings Volume 9624, 2015 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication; 96240F (2015) https://doi.org/10.1117/12.2193399
Event: International Conference on Optical Instruments and Technology 2015, 2015, Beijing, China
Abstract
The echelle gratings with the ultra-high resolution are one of the key elements in spectroscopy, optical communications and other fields. Currently, the diamond ruling and the wet etching technique are two primary methods to fabricate echelle gratings. In this paper, we have adopted a new method of the echelle gratings fabrication. Firstly, the holographic lithography is used to form a photoresist grating mask. Then, reactive ion etching is adopted to fabricate the native substrate grating mask to replace the traditional photoresist grating mask, which allows more accurate control of the profile. Finally, the tilted ion-beam etching is used to etch the native substrate grating to ensure the precise control of the blazed angle and anti-blazed angle. A prototype of the echelle gratings with a line density of 80 lp/mm has been fabricated by above method.
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Quan Liu, Quan Liu, Fei Gao, Fei Gao, Yang Zhou, Yang Zhou, Jianhong Wu, Jianhong Wu, } "The fabrication of the holographic echelle gratings", Proc. SPIE 9624, 2015 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication, 96240F (12 August 2015); doi: 10.1117/12.2193399; https://doi.org/10.1117/12.2193399
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