Frits Zernike and microlithography

David M. Williamson

doi:10.1117/12.2191129

25 September 2015 Frits Zernike and microlithography

David M. Williamson

Author Affiliations +

Proceedings Volume 9626, Optical Systems Design 2015: Optical Design and Engineering VI; 962606 (2015) https://doi.org/10.1117/12.2191129
Event: SPIE Optical Systems Design, 2015, Jena, Germany

Abstract

Zernike polynomial surface and wavefront descriptions have been used in the manufacture of projection optics for microlithography since the 1970’s. This is because the optical tolerances are so small that one cannot rely on trial-anderror to achieve diffraction-limited wavefront correction. No manufactured optical surface can be considered to be spherical or even rotationally symmetrical; they have to be measured and systematically compensated. Over the last few decades of Moore’s Law there have been continuing decreases in wavefront tolerances and a consequent increase in sophistication of deterministic optical polishing and compensation strategies for residual surface and alignment errors. Optical designs have evolved from all-spherical to the inclusion of rotationally symmetric aspheric surfaces, more recently in the form of Forbes Q-type polynomials, to Zernike polynomials that include bilaterally symmetric terms. These historical trends and their application to EUV projection optics are reviewed and illustrated with two recent optical designs.

Citation Download Citation

David M. Williamson "Frits Zernike and microlithography", Proc. SPIE 9626, Optical Systems Design 2015: Optical Design and Engineering VI, 962606 (25 September 2015); https://doi.org/10.1117/12.2191129

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE