Lens-mount stability trade-off: a survey exemplified for DUV wafer inspection objectives

Achmed Bouazzam; Torsten Erbe; Stephan Fahr; Jan Werschnik

doi:10.1117/12.2191511

23 September 2015 Lens-mount stability trade-off: a survey exemplified for DUV wafer inspection objectives

Achmed Bouazzam, Torsten Erbe, Stephan Fahr, Jan Werschnik

Proceedings Volume 9626, Optical Systems Design 2015: Optical Design and Engineering VI; 96261E (2015) https://doi.org/10.1117/12.2191511
Event: SPIE Optical Systems Design, 2015, Jena, Germany

Abstract

The position stability of optical elements is an essential part of the tolerance budget of an optical system because its compensation would require an alignment step after the lens has left the factory. In order to achieve a given built performance the stability error contribution needs to be known and accounted for. Given a high-end lens touching the edge of technology not knowing, under- or overestimating this contribution becomes a serious cost and risk factor. If overestimated the remaining parts of the budget need to be tighter. If underestimated the total project might fail. For many mounting principles the stability benchmark is based on previous systems or information gathered by elaborated testing of complete optical systems. This renders the development of a new system into a risky endeavour, because these experiences are not sufficiently precise and tend to be not transferable when scaling of the optical elements is intended. This contribution discusses the influences of different optical mounting concepts on the position stability using the example of high numerical aperture (HNA) inspection lenses working in the deep ultraviolet (DUV) spectrum. A method to investigate the positional stability is presented for selected mounting examples typical for inspection lenses.

Citation Download Citation

Achmed Bouazzam, Torsten Erbe, Stephan Fahr, and Jan Werschnik "Lens-mount stability trade-off: a survey exemplified for DUV wafer inspection objectives", Proc. SPIE 9626, Optical Systems Design 2015: Optical Design and Engineering VI, 96261E (23 September 2015); https://doi.org/10.1117/12.2191511

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available