23 September 2015 Optimization of novel phase separating IBS process
Author Affiliations +
Abstract
During the last years, optical low loss components gained more and more industrial interest and led to novel approaches for the production in optical coating technology. The application of filtered deposition technologies promises a significant reduction of particle contamination. Usually, filtered techniques are applied in combination with processes which produce a high level of undesired particles, like the cathodic arc deposition. In the present contribution, a magnetic field filter is applied in combination with a high quality ion beam sputtering process. The focus of the investigation constitutes the modulation of the guiding process with respect to the guiding efficiency. Numerical investigations reveal the trajectories of the ions during the guiding process and allow to analyze the influence of the magnetic field and the resulting electrostatic potential. In this study, the guiding effect is observed to be dominated by the electric potential compared to the magnetic field. However according to the simulations, very high ion guiding efficiencies can be achieved using moderate magnetic fields and electrical potentials. Furthermore, it is demonstrated that the experiemental and calculated efficiencies agree well. Consequently, the simulation is the basis for a further optimization of the filtered ion beam sputtering processes.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Marco Jupé, Marco Jupé, Thomas Willemsen, Thomas Willemsen, Sina Malobabic, Sina Malobabic, Kornelia Schuba, Kornelia Schuba, Detlev Ristau, Detlev Ristau, } "Optimization of novel phase separating IBS process ", Proc. SPIE 9627, Optical Systems Design 2015: Advances in Optical Thin Films V, 96270K (23 September 2015); doi: 10.1117/12.2191229; https://doi.org/10.1117/12.2191229
PROCEEDINGS
9 PAGES


SHARE
RELATED CONTENT

New sputtering concept for optical precision coatings
Proceedings of SPIE (October 03 2011)
Low-loss ion beam sputtered coatings in the nineties
Proceedings of SPIE (November 03 1994)
ATON-thruster plasma accelerator
Proceedings of SPIE (August 01 2000)
Modeling of high-density plasma sources
Proceedings of SPIE (April 15 1993)

Back to Top