Complex optical interference filter with stress compensation

Thomas Begou; Hélène Krol; Dragan Stojcevski; Fabien Lemarchand; Michel Lequime; Catherine Grezes-Besset; Julien Lumeau

doi:10.1117/12.2191967

23 September 2015 Complex optical interference filter with stress compensation

Thomas Begou, Hélène Krol, Dragan Stojcevski, Fabien Lemarchand, Michel Lequime, Catherine Grezes-Besset, Julien Lumeau

Proceedings Volume 9627, Optical Systems Design 2015: Advances in Optical Thin Films V; 96270R (2015) https://doi.org/10.1117/12.2191967
Event: SPIE Optical Systems Design, 2015, Jena, Germany

Abstract

We present hereafter the results on the fabrication of complex optical filters within the Institut Fresnel in close collaboration with CILAS. Bandpass optical interference filters, with central wavelengths ranging in near ultraviolet or in the near infrared, were deposited on both sides of glass substrates with a very good congruence with theoretical designs. For these applications, the required functions are particularly complex as they must present a very narrow bandwidth as well as a high level of rejection over a broad spectral range. Moreover, in order to satisfy more and more critical specifications on flatness of the component treated on both faces, the stress induced by the different layers has to be taken in account in the filter design.

All these components were manufactured using Plasma Assisted Reactive Magnetron Sputtering (PARMS) technics offered by the HELIOS machine and monitored in real time with an OMS5000 in-situ optical monitoring, both developed by BUHLER Optics.

Compressive mechanical stress of 364 MPa and 55 MPa respectively for SiO₂ and Nb₂O₅ are measured, final sag of 326 nm and 13 nm, and uniformity from -0.05% to 0.10% and from -0.10% to 0.20% are obtained respectively for the two manufactured filters.

Citation Download Citation

Thomas Begou, Hélène Krol, Dragan Stojcevski, Fabien Lemarchand, Michel Lequime, Catherine Grezes-Besset, and Julien Lumeau "Complex optical interference filter with stress compensation", Proc. SPIE 9627, Optical Systems Design 2015: Advances in Optical Thin Films V, 96270R (23 September 2015); https://doi.org/10.1117/12.2191967

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