Advanced optical monitoring system using a new developed low noise wideband spectrometer system

Alfons Zöller; Detlef Arhilger; Michael Boos; Harro Hagedorn

doi:10.1117/12.2191269

23 September 2015 Advanced optical monitoring system using a new developed low noise wideband spectrometer system

Alfons Zöller, Detlef Arhilger, Michael Boos, Harro Hagedorn

Proceedings Volume 9627, Optical Systems Design 2015: Advances in Optical Thin Films V; 962712 (2015) https://doi.org/10.1117/12.2191269
Event: SPIE Optical Systems Design, 2015, Jena, Germany

Abstract

A newly developed wideband optical monitoring system is based on a fast triggered spectrometer with a high dynamic array detector with low signal noise. It is useful for fast in-situ transmittance measurements on the rotating substrate holder during the deposition. The spectra can be stored and used for reverse engineering analysis. Layer thickness control with monochromatic monitoring strategies can be applied by using a selected single wavelength from the array detector. The high dynamic detector supports the classical turning point monitoring as well as trigger-point cut-offs with online corrected end points. The basic system design and functionalities are described. The results of multilayer systems demonstrate the performance of the new developed monitoring system.

Citation Download Citation

Alfons Zöller, Detlef Arhilger, Michael Boos, and Harro Hagedorn "Advanced optical monitoring system using a new developed low noise wideband spectrometer system", Proc. SPIE 9627, Optical Systems Design 2015: Advances in Optical Thin Films V, 962712 (23 September 2015); https://doi.org/10.1117/12.2191269

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