Multiple optical bandpass, edge filters and notch filters have been deposited in a high throughput IBS system with four 333mm diameter planetary using both a single wavelength (SWLOMS) as well as a broadband OMS (BBOMS). A wavelength repeatability of less than 0.1% for five subsequent short wave pass filters is demonstrated. Results for a multi notch filter coated using the BBOMS are also presented. A control strategy utilizing a mix of a broadband and a single wavelength model was used successfully in the deposition.
Spectral performance of multiple bandpass filters using turning point control is presented. A 2D mapping of a 15nm FWHM bandpass filter centered at 830nm shows a +/-0.05% variation in the center wavelength across the central 180mm diameter and a +/-0.35nm variation in the FWHM to the edge of the wafer. A variation of the standard turning point monitoring that enables control of filters with narrower bandwidth than the spectral resolution of the OMS system has been developed. A 0.8nm FWHM bandpass filter centered at 532nm controlled using a BBOMS with a ~1.5nm FWHM spectral resolution of the spectrometer is demonstrated.