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23 September 2015 Structual and optical performance of Pd/B4C working from 7.5nm to 12nm
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Abstract
Boron or boron carbide based multilayers are widely used due to the boron-K absorption edge format λ=6.7nm. Pd/B4C has a relatively high theoretical reflectivity from 7.5nm to 11nm, compared to other candidates like Mo/B4C and La/B4C. It can also be easily fabricated by direct current magnetron sputtering technique. In this paper, different process parameters, including base pressure and sputtering pressure, are optimized to develop the Pd/B4C multilayer mirror. A reflectance of 36.2% were obtained at 9.41nm with 80 bilayers Pd/B4C. Reactive sputtering with nitrogen was also explored to improve the structure and reduce the stress of the Pd/B4C multilayers. The results showed that the EUV reflectance was not improved after the introduction of nitrogen while the stress was actually reduced.
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Yiwen Wang, Qiushi Huang, Qiang Yi, Jinshuai Zhang, Mingwu Wen, Jiang Li, Dechao Xu, Zhong Zhang, and Zhanshan Wang "Structual and optical performance of Pd/B4C working from 7.5nm to 12nm", Proc. SPIE 9627, Optical Systems Design 2015: Advances in Optical Thin Films V, 96271Q (23 September 2015); https://doi.org/10.1117/12.2191296
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