Manufacturing and testing large SiC mirrors in an efficient way

Xuejun Zhang; Xuefeng Zeng; Haixiang Hu; Xiao Luo

doi:10.1117/12.2189751

24 September 2015 Manufacturing and testing large SiC mirrors in an efficient way

Xuejun Zhang, Xuefeng Zeng, Haixiang Hu, Xiao Luo

Proceedings Volume 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V; 96280S (2015) https://doi.org/10.1117/12.2189751
Event: SPIE Optical Systems Design, 2015, Jena, Germany

Abstract

SiC mirrors are of excellent mechanical and thermal properties compared to their glass opponents. Efficient fabrication and testing of SiC mirrors, particularly the large freeform surfaces are very challenging. In this paper, direct CNC generation, deterministic polishing techniques including CCOS, MRF, and IBF were addressed in detail. Since testing is critical to make high accuracy freeform surfaces, the paper focused on Computer Generated Hologram (CGH) design and implement to measure large mirrors. In particular, detector to mirror mapping distortion was discussed in detail. Finally, some results for SiC mirrors were presented.

Citation Download Citation

Xuejun Zhang, Xuefeng Zeng, Haixiang Hu, and Xiao Luo "Manufacturing and testing large SiC mirrors in an efficient way", Proc. SPIE 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V, 96280S (24 September 2015); https://doi.org/10.1117/12.2189751

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