In this contribution we propose a compact low cost lensless digital holographic microscope capable of performing measurements on reflective microstructures. The novelty of the system consists on a direct use of a laser diode without any need of coupling optics as light source. This simplifies the setup and provides sufficient magnification to measure microstructures. We evaluate our setup by imaging reflective microstructures. We have achieved ̴ 6 mm2 field of view amplitude images with ̴ 2.5μm lateral resolution and phase images with axial resolution in nanometer range. The phase image provides a full-field profile measurement of the sample in nanometer range.
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