In-line metrology setup for periodic nanostructures based on sub-wavelength diffraction

Martin Kreuzer; Jordi Gomis Bresco; Marianna Sledzinska; Clivia M. Sotomayor Torres

doi:10.1117/12.2191346

24 September 2015 In-line metrology setup for periodic nanostructures based on sub-wavelength diffraction

Martin Kreuzer, Jordi Gomis Bresco, Marianna Sledzinska, Clivia M. Sotomayor Torres

Proceedings Volume 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V; 96281Q (2015) https://doi.org/10.1117/12.2191346
Event: SPIE Optical Systems Design, 2015, Jena, Germany

Abstract

The analysis of diffracted light from periodic structures is shown to be a versatile metrology technique applicable to inline metrology for periodic nanostructures. We show that 10 nm changes in periodic structures can be traced optically by means of sub-wavelength diffraction. Polymer gratings were fabricated by electron beam lithography. The gratings have a common periodicity of 6 μm, but different line width, ranging from 370 to 550 nm in 10 nm steps. A comparison between the resulting diffraction patterns shows marked differences in intensity which are used to sense nanometre scale deviations in periodic structures.

Citation Download Citation

Martin Kreuzer, Jordi Gomis Bresco, Marianna Sledzinska, and Clivia M. Sotomayor Torres "In-line metrology setup for periodic nanostructures based on sub-wavelength diffraction", Proc. SPIE 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V, 96281Q (24 September 2015); https://doi.org/10.1117/12.2191346

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