Translator Disclaimer
24 September 2015 In-line metrology setup for periodic nanostructures based on sub-wavelength diffraction
Author Affiliations +
The analysis of diffracted light from periodic structures is shown to be a versatile metrology technique applicable to inline metrology for periodic nanostructures. We show that 10 nm changes in periodic structures can be traced optically by means of sub-wavelength diffraction. Polymer gratings were fabricated by electron beam lithography. The gratings have a common periodicity of 6 μm, but different line width, ranging from 370 to 550 nm in 10 nm steps. A comparison between the resulting diffraction patterns shows marked differences in intensity which are used to sense nanometre scale deviations in periodic structures.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Martin Kreuzer, Jordi Gomis Bresco, Marianna Sledzinska, and Clivia M. Sotomayor Torres "In-line metrology setup for periodic nanostructures based on sub-wavelength diffraction", Proc. SPIE 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V, 96281Q (24 September 2015);

Back to Top