This method of optical scanning presented in this paper is used for precision measurement deformation in shape or absolute forms in comparison with a reference component form, of optical or mechanical components, on reduced surfaces area that are of the order of some mm2 and more. The principle of the method is to project the image of the source grating to palpate optically surface to be inspected, after reflection; the image of the source grating is printed by the object topography and is then projected onto the plane of reference grating for generate moiré fringe for defects detection. The optical device used allows a significant dimensional surface magnification of up to 1000 times the area inspected for micro-surfaces, which allows easy processing and reaches an exceptional nanometric imprecision of measurements. According to the measurement principle, the sensitivity for displacement measurement using moiré technique depends on the frequency grating, for increase the detection resolution. This measurement technique can be used advantageously to measure the deformations generated by the production process or constraints on functional parts and the influence of these variations on the function. The optical device and optical principle, on which it is based, can be used for automated inspection of industrially produced goods. It can also be used for dimensional control when, for example, to quantify the error as to whether a piece is good or rubbish. It then suffices to compare a figure of moiré fringes with another previously recorded from a piece considered standard; which saves time, money and accuracy. The technique has found various applications in diverse fields, from biomedical to industrial and scientific applications.