Comparative study of the laser damage threshold and optical characteristics of Ta2O5-SiO2 multilayers deposited using various methods

Roelene Botha; Silvia Schwyn Thöny; Martin Grössl; Safer Mourad; Clau Maissen; Jacobus I. Venter; Thomas Südmeyer; Martin Hoffmann; Pavel V. Bulkin; Sabine Linz-Dittrich; David Bischof; Markus Michler; Stefan J. Rinner; Andreas Ettemeyer

doi:10.1117/12.2194084

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23 November 2015 Comparative study of the laser damage threshold and optical characteristics of Ta₂O₅-SiO₂ multilayers deposited using various methods

Roelene Botha, Silvia Schwyn Thöny, Martin Grössl, Safer Mourad, Clau Maissen, Jacobus I. Venter, Thomas Südmeyer, Martin Hoffmann, Pavel V. Bulkin, Sabine Linz-Dittrich, David Bischof, Markus Michler, Stefan J. Rinner, Andreas Ettemeyer

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Proceedings Volume 9632, Laser-Induced Damage in Optical Materials: 2015; 963203 (2015) https://doi.org/10.1117/12.2194084
Event: SPIE Laser Damage, 2015, Boulder, Colorado, United States

Abstract

Manufacturing processes from the private and academic sectors were used to deposit anti-reflective and high-reflective coatings composed of Ta₂O₅ - SiO₂ multilayers. Used deposition techniques included three Ion Assisted Deposition (IAD) systems and an Ion Beam Sputtering (IBS) system. Coatings were performed on fused silica (Corning 7980) substrates polished by two different suppliers. LIDT Measurements were performed using a Q-Switched Nd:YAG laser operating at 1064nm. The paper presents a comparison of the coatings in terms of laser damage threshold values, optical properties and surface quality.

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Roelene Botha, Silvia Schwyn Thöny, Martin Grössl, Safer Mourad, Clau Maissen, Jacobus I. Venter, Thomas Südmeyer, Martin Hoffmann, Pavel V. Bulkin, Sabine Linz-Dittrich, David Bischof, Markus Michler, Stefan J. Rinner, and Andreas Ettemeyer "Comparative study of the laser damage threshold and optical characteristics of Ta₂O₅-SiO₂ multilayers deposited using various methods", Proc. SPIE 9632, Laser-Induced Damage in Optical Materials: 2015, 963203 (23 November 2015); https://doi.org/10.1117/12.2194084

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