23 November 2015 Comparative study of the laser damage threshold and optical characteristics of Ta2O5-SiO2 multilayers deposited using various methods
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Abstract
Manufacturing processes from the private and academic sectors were used to deposit anti-reflective and high-reflective coatings composed of Ta2O5 - SiO2 multilayers. Used deposition techniques included three Ion Assisted Deposition (IAD) systems and an Ion Beam Sputtering (IBS) system. Coatings were performed on fused silica (Corning 7980) substrates polished by two different suppliers. LIDT Measurements were performed using a Q-Switched Nd:YAG laser operating at 1064nm. The paper presents a comparison of the coatings in terms of laser damage threshold values, optical properties and surface quality.
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Roelene Botha, Roelene Botha, Silvia Schwyn Thöny, Silvia Schwyn Thöny, Martin Grössl, Martin Grössl, Safer Mourad, Safer Mourad, Clau Maissen, Clau Maissen, Jacobus I. Venter, Jacobus I. Venter, Thomas Südmeyer, Thomas Südmeyer, Martin Hoffmann, Martin Hoffmann, Pavel V. Bulkin, Pavel V. Bulkin, Sabine Linz-Dittrich, Sabine Linz-Dittrich, David Bischof, David Bischof, Markus Michler, Markus Michler, Stefan J. Rinner, Stefan J. Rinner, Andreas Ettemeyer, Andreas Ettemeyer, } "Comparative study of the laser damage threshold and optical characteristics of Ta2O5-SiO2 multilayers deposited using various methods", Proc. SPIE 9632, Laser-Induced Damage in Optical Materials: 2015, 963203 (23 November 2015); doi: 10.1117/12.2194084; https://doi.org/10.1117/12.2194084
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