Translator Disclaimer
Paper
11 October 2015 Comparison of various colloidal silica slurries and process parameters for fused silica finishing
Author Affiliations +
Proceedings Volume 9633, Optifab 2015; 963308 (2015) https://doi.org/10.1117/12.2195724
Event: SPIE Optifab, 2015, Rochester, New York, United States
Abstract
We have selected three colloidal silica slurries and compared their ability for fused silica finishing, by varying the load and slurry concentration. We found that the process parameters can affect differently the finishing efficiency, roughness and surface defects density, depending on the slurry considered.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. Campaignolle, C. Maunier, and J. Neauport "Comparison of various colloidal silica slurries and process parameters for fused silica finishing", Proc. SPIE 9633, Optifab 2015, 963308 (11 October 2015); https://doi.org/10.1117/12.2195724
PROCEEDINGS
5 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT


Back to Top