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11 October 2015Comparison of various colloidal silica slurries and process parameters for fused silica finishing
We have selected three colloidal silica slurries and compared their ability for fused silica finishing, by varying the load and slurry concentration. We found that the process parameters can affect differently the finishing efficiency, roughness and surface defects density, depending on the slurry considered.
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S. Campaignolle, C. Maunier, J. Neauport, "Comparison of various colloidal silica slurries and process parameters for fused silica finishing," Proc. SPIE 9633, Optifab 2015, 963308 (11 October 2015); https://doi.org/10.1117/12.2195724