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11 October 2015 Smoothing of optical surface corners by abrasive polishing with a plate spring
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Proceedings Volume 9633, Optifab 2015; 96330N (2015) https://doi.org/10.1117/12.2196080
Event: SPIE Optifab, 2015, Rochester, New York, United States
Abstract
We propose a new method for polishing the corners of optical surfaces that uses a plate spring as a polishing tool. In this method, a polishing pad is fixed to the tip of a plate spring, which moves back and forth on a workpiece surface. During the polishing, the plate spring is bent while maintaining a constant amount of deflection to generate a stable polishing load. The edge of the plate spring enables the polishing of the corners of the workpiece. We have developed a polishing machine with a plate spring, and we performed polishing experiments on silicon plates to investigate the fundamental characteristics of our proposed method. It was found that the roughness of workpiece surfaces decreases with the progress of polishing and that the areas are polished almost uniformly, demonstrating the effectiveness of our polishing method.
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Hideo Takino, Yusuke Saito, Kazuya Tsuji, and Naoki Mouri "Smoothing of optical surface corners by abrasive polishing with a plate spring", Proc. SPIE 9633, Optifab 2015, 96330N (11 October 2015); https://doi.org/10.1117/12.2196080
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