Recent developments in IR metrology using quadri wave lateral shearing interferometry

W. Boucher; G. Bourgeois; M. Deprez; E. Homassel; B. Wattellier

doi:10.1117/12.2195806

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12 October 2015 Recent developments in IR metrology using quadri wave lateral shearing interferometry

W. Boucher, G. Bourgeois, M. Deprez, E. Homassel, B. Wattellier

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Proceedings Volume 9633, Optifab 2015; 96331T (2015) https://doi.org/10.1117/12.2195806
Event: SPIE Optifab, 2015, Rochester, New York, United States

Abstract

We present various applications of Quadri Wave Lateral Shearing Interferometry to infrared optical metrology. Phasics has developed wave front sensors compatible with wavelengths ranging from 193nm to 14 μm. Several camera technologies are integrated with patented diffractive optics adapted to the various spectral ranges. In the infrared range, InGaAs, MCT and microbolometers are used as light sensors. We developed a bench to qualify lenses with diameter from 2mm to 100mm in the LWIR spectral range. Thanks to an innovative ray-trace algorithm, we are able to compare the wave front measurement to the optical design enabling a feedback between lens manufacture and design. We also developed a VSWIR wave front sensor with a constant accuracy from 0.4μm to 1.7 μm. It also includes the Extended Tilt feature that enables sub-mrad accuracy on tilt measurement over a range of more than +-30°.

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W. Boucher, G. Bourgeois, M. Deprez, E. Homassel, and B. Wattellier "Recent developments in IR metrology using quadri wave lateral shearing interferometry", Proc. SPIE 9633, Optifab 2015, 96331T (12 October 2015); https://doi.org/10.1117/12.2195806

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