28 September 2015 Ultra-sensitive acoustic fiber sensors utilizing nano-membranes
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Proceedings Volume 9634, 24th International Conference on Optical Fibre Sensors; 96341P (2015) https://doi.org/10.1117/12.2194400
Event: International Conference on Optical Fibre Sensors (OFS24), 2015, Curitiba, Brazil
Abstract
A new, highly sensitive, compact fiber acoustic sensor is reported that implements a micro-fabricated silicon membrane with a π/2 phase step combined to a single-mode fiber to form a simple interferometric sensor head. Compared to high-sensitivity membrane-based fiber Fabry-Perot (FP) sensors, it has a similar pressure resolution, it operates over a much broad range of wavelengths (~±150 nm vs. ~±1 nm), and fabrication is simpler. A prototype is reported with an average minimum detectable pressure (MDP) as low as 5.4 μPa/√Hz (1-30 kHz), in agreement with a model. A state-of-the-art FP fiber sensor with an average MDP about twice as low is described for comparison.
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Wonuk Jo, Wonuk Jo, M. J. F. Digonnet, M. J. F. Digonnet, } "Ultra-sensitive acoustic fiber sensors utilizing nano-membranes", Proc. SPIE 9634, 24th International Conference on Optical Fibre Sensors, 96341P (28 September 2015); doi: 10.1117/12.2194400; https://doi.org/10.1117/12.2194400
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