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28 September 2015 Temperature sensor based on a tapered optical fiber with ALD nanofilm
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Proceedings Volume 9634, 24th International Conference on Optical Fibre Sensors; 963474 (2015) https://doi.org/10.1117/12.2194542
Event: International Conference on Optical Fibre Sensors (OFS24), 2015, Curitiba, Brazil
Abstract
A temperature sensor with high sensitivity based on a tapered optical fiber with Al2O3 nanofilm by atomic layer deposition (ALD) technology is presented. Attributed to the high refractive index Al2O3 nanofilm overlay, an asymmetry Fabry-Perot interferometer is formed along the tapered fiber. Based on the ray-optic analysis, the resonant dip in the interference transmission spectrum depends on the phase delay variation induced by the Goos-Hänchen shift at the nanofilm-coating interface. As a result, the interference transmission spectrum shows good sensitivity to the change of surrounding refractive index. In this work, a temperature-sensitive silicone gel is coated around the fiber taper with Al2O3 nanofilm to realize a high sensitivity temperature sensor. The high sensitivity of 2.44 nm/°C is obtained.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shan Zhu, Fufei Pang, Jianxiang Wen, Ziwen Zhao, and Tingyun Wang "Temperature sensor based on a tapered optical fiber with ALD nanofilm", Proc. SPIE 9634, 24th International Conference on Optical Fibre Sensors, 963474 (28 September 2015); https://doi.org/10.1117/12.2194542
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