Temperature sensor based on a tapered optical fiber with ALD nanofilm

Shan Zhu; Fufei Pang; Jianxiang Wen; Ziwen Zhao; Tingyun Wang

doi:10.1117/12.2194542

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28 September 2015 Temperature sensor based on a tapered optical fiber with ALD nanofilm

Shan Zhu, Fufei Pang, Jianxiang Wen, Ziwen Zhao, Tingyun Wang

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Proceedings Volume 9634, 24th International Conference on Optical Fibre Sensors; 963474 (2015) https://doi.org/10.1117/12.2194542
Event: International Conference on Optical Fibre Sensors (OFS24), 2015, Curitiba, Brazil

Abstract

A temperature sensor with high sensitivity based on a tapered optical fiber with Al₂O₃ nanofilm by atomic layer deposition (ALD) technology is presented. Attributed to the high refractive index Al₂O₃ nanofilm overlay, an asymmetry Fabry-Perot interferometer is formed along the tapered fiber. Based on the ray-optic analysis, the resonant dip in the interference transmission spectrum depends on the phase delay variation induced by the Goos-Hänchen shift at the nanofilm-coating interface. As a result, the interference transmission spectrum shows good sensitivity to the change of surrounding refractive index. In this work, a temperature-sensitive silicone gel is coated around the fiber taper with Al₂O₃ nanofilm to realize a high sensitivity temperature sensor. The high sensitivity of 2.44 nm/°C is obtained.

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Shan Zhu, Fufei Pang, Jianxiang Wen, Ziwen Zhao, and Tingyun Wang "Temperature sensor based on a tapered optical fiber with ALD nanofilm", Proc. SPIE 9634, 24th International Conference on Optical Fibre Sensors, 963474 (28 September 2015); https://doi.org/10.1117/12.2194542

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