A thin section sample of gadolinium nanoparticles ranging in size up to 50 nm mounted on an aluminum substrate was prepared using in-situ lift-out (INLO) by FIB. The sample was thinned using 30 kV Ga+ FIB to approximately 125 nm. Using an in-situ stage with 360 degree continuous tilt, the thin section was imaged every 1 degree with 30 keV SEM and the STEM detector through approximately 125 degrees of tilt. The data set was then reconstructed into a 3D rendering using FEI's tomography reconstruction software, Inspect3D Express, and visualized using FEI's Avizo image and data analysis software. The technique and results compared with conventional TEM and STEM tomography using a 200 keV FEI Talos TEM will be discussed.
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Brandon Van Leer, Cedric Bouchet-Marquis, Huikai Cheng, "Three-dimensional characterization of Gd nanoparticles using STEM-in-SEM tomography in a dual-beam FIB-SEM," Proc. SPIE 9636, Scanning Microscopies 2015, 963606 (21 October 2015);