Investigation of electron beam irradiation effect on pore formation

Seong Soo Choi; Myoung Jin Park; Chul Hee Han; Sung In Kim; Jung Ho Yoo; Kyung Jin Park; Nam Kyou Park; Yong-Sang Kim

doi:10.1117/12.2185519

21 October 2015 Investigation of electron beam irradiation effect on pore formation

Seong Soo Choi, Myoung Jin Park, Chul Hee Han, Sung In Kim, Jung Ho Yoo, Kyung Jin Park, Nam Kyou Park, Yong-Sang Kim

Proceedings Volume 9636, Scanning Microscopies 2015; 96360B (2015) https://doi.org/10.1117/12.2185519
Event: SPIE Scanning Microscopies, 2015, Monterey, California, United States

Abstract

There have been tremendous interests about the fabrication of the Au plasmonic nanopore due to its capability of the nanosize optical biosensor. We have investigated the influence of low energy electron beam irradiation on an Au nanomembrane during Au nanopore formation. In this report, the influence of electron beam irradiation on the Au nanopore formation will be reported. The nanopores on the 200 nm thick Au membrane were initially fabricated using focused ion beam (FIB) and high energy electron beam techniques such as transmission electron microscopy (TEM), and field emission scanning electron microscopy (FESEM). During high energy electron beam by using TEM, either a "shrinking" or a "opening" phenomenon is reported dependent on the ratio of thickness to aperture diameter. However, for a FESEM electron beam irradiation, a shrinking phenomenon is always observed. In this report, the nanopore formation during FESEM electron beam irradiation will be reported depending upon energy absorption and thermal diffusivity.

Citation Download Citation

Seong Soo Choi, Myoung Jin Park, Chul Hee Han, Sung In Kim, Jung Ho Yoo, Kyung Jin Park, Nam Kyou Park, and Yong-Sang Kim "Investigation of electron beam irradiation effect on pore formation", Proc. SPIE 9636, Scanning Microscopies 2015, 96360B (21 October 2015); https://doi.org/10.1117/12.2185519

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