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1 July 2015 Multi-channel optical gap sensor based on spectrally-resolved interferometry
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Proceedings Volume 9655, Fifth Asia-Pacific Optical Sensors Conference; 965502 (2015) https://doi.org/10.1117/12.2183997
Event: Fifth Asia Pacific Optical Sensors Conference, 2015, Jeju, Korea, Republic of
Abstract
In this investigation, we propose a multi-channel optical sensor to be used for precision industry to measure small gaps of a target or motion errors of a moving stage. The sensor consists of optical fiber components such as a CWDM and fiber probes for compactness, reliability and easy use. The operating principle of the sensor is based on the spectrally-resolved interferometry, where the spectral interferogram using a broadband light source is detected by a spectrometer. Each channel possesses its own spectrum as a result of spectral filtering of a CWDM and measures the distance independently. This optical sensor does not need any mechanical or electrical moving parts it can realize real-time measurements. In this presentation, we show the operating principle of the multi-channel optical gap sensor, its optical configuration and the experimental results.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Byeong Kwon Kim, Yong Bum Seo, and Ki-Nam Joo "Multi-channel optical gap sensor based on spectrally-resolved interferometry", Proc. SPIE 9655, Fifth Asia-Pacific Optical Sensors Conference, 965502 (1 July 2015); https://doi.org/10.1117/12.2183997
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