1 July 2015 Improvement in topology measurement accuracy of atomic force microscope using additional sensor
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Proceedings Volume 9655, Fifth Asia-Pacific Optical Sensors Conference; 96550K (2015) https://doi.org/10.1117/12.2184430
Event: Fifth Asia Pacific Optical Sensors Conference, 2015, Jeju, Korea, Republic of
Abstract
The topology image of an atomic force microscope is obtained by picking up a controlled output of a force-feedback loop that is proportional to the height of a sample under the assumption that no dynamics in a z-axis actuator exist. However, the dynamic effects such as hysteresis and creep in a PZT driving z-axis actuator cannot be ignored. To solve this problem, a strain-gage sensor is used as an additional sensor, which enables measurement of the absolute displacement of a z-axis PZT nano scanner. The advantage of using an additional sensor is experimentally provided and validated in topology images.
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Yeomin Yoon, Yeomin Yoon, Jiseong Jeong, Jiseong Jeong, Junsup Kim, Junsup Kim, Kyihwan Park, Kyihwan Park, } "Improvement in topology measurement accuracy of atomic force microscope using additional sensor", Proc. SPIE 9655, Fifth Asia-Pacific Optical Sensors Conference, 96550K (1 July 2015); doi: 10.1117/12.2184430; https://doi.org/10.1117/12.2184430
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