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1 July 2015 Improvement in topology measurement accuracy of atomic force microscope using additional sensor
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Proceedings Volume 9655, Fifth Asia-Pacific Optical Sensors Conference; 96550K (2015) https://doi.org/10.1117/12.2184430
Event: Fifth Asia Pacific Optical Sensors Conference, 2015, Jeju, Korea, Republic of
Abstract
The topology image of an atomic force microscope is obtained by picking up a controlled output of a force-feedback loop that is proportional to the height of a sample under the assumption that no dynamics in a z-axis actuator exist. However, the dynamic effects such as hysteresis and creep in a PZT driving z-axis actuator cannot be ignored. To solve this problem, a strain-gage sensor is used as an additional sensor, which enables measurement of the absolute displacement of a z-axis PZT nano scanner. The advantage of using an additional sensor is experimentally provided and validated in topology images.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yeomin Yoon, Jiseong Jeong, Junsup Kim, and Kyihwan Park "Improvement in topology measurement accuracy of atomic force microscope using additional sensor", Proc. SPIE 9655, Fifth Asia-Pacific Optical Sensors Conference, 96550K (1 July 2015); https://doi.org/10.1117/12.2184430
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