1 July 2015 Sensing properties of periodic stack of nano-films deposited with various vapor-based techniques on optical fiber end-face
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Proceedings Volume 9655, Fifth Asia-Pacific Optical Sensors Conference; 96550R (2015) https://doi.org/10.1117/12.2185153
Event: Fifth Asia Pacific Optical Sensors Conference, 2015, Jeju, Korea, Republic of
Abstract
This work presents a study on sensing capabilities of stacks of nano-films deposited on a single-mode optical fiber end-faces. The stacks consist of periodically interchanging thin-film layers of materials characterized by different refractive indices (RI). The number of layers is relatively small to encourage light-analyte interactions. Two different deposition techniques are considered, i.e., radio frequency plasma enhanced chemical vapor deposition (RF PECVD) and physical vapor deposition by reactive magnetron sputtering (RMS). The former technique allows to deposit stacks consisting of silicon nitride nano-films, and the latter is well suited for aluminum and titanium oxides alternating layers. The structures are tested for external RI and temperature measurements.
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Marcin Koba, Marcin Koba, Radosław Różycki-Bakon, Radosław Różycki-Bakon, Piotr Firek, Piotr Firek, Mateusz Śmietana, Mateusz Śmietana, } "Sensing properties of periodic stack of nano-films deposited with various vapor-based techniques on optical fiber end-face", Proc. SPIE 9655, Fifth Asia-Pacific Optical Sensors Conference, 96550R (1 July 2015); doi: 10.1117/12.2185153; https://doi.org/10.1117/12.2185153
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