1 July 2015 Planar waveguide Michelson interferometer fabricated by using 157nm mask laser micromachining
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Proceedings Volume 9655, Fifth Asia-Pacific Optical Sensors Conference; 965531 (2015) https://doi.org/10.1117/12.2184265
Event: Fifth Asia Pacific Optical Sensors Conference, 2015, Jeju, Korea, Republic of
A Michelson interferometer is fabricated on silica planar waveguide by using the one-step technology based on 157nm mask laser micromachining. The fabrication time for one device is ~10s. Experimental results show that such an interferometer has an excellent fringe contrast of >20dB. Its temperature and refractive index (RI) responses are tested by observing the wavelength shift of the interferometric fringes, which shows linear characteristics with a thermo-coefficient of ~9.5pm/°C and a RI-coefficient of ~36.7nm/RIU, respectively. The fabrication technology may pave a new way for direct writing of planar silica waveguide devices for sensing applications with high efficiency and quality.
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Haihong Bao, Haihong Bao, Zengling Ran, Zengling Ran, Xuezhong Wu, Xuezhong Wu, Ke Yang, Ke Yang, Yuan Jiang, Yuan Jiang, Yunjiang Rao, Yunjiang Rao, } "Planar waveguide Michelson interferometer fabricated by using 157nm mask laser micromachining", Proc. SPIE 9655, Fifth Asia-Pacific Optical Sensors Conference, 965531 (1 July 2015); doi: 10.1117/12.2184265; https://doi.org/10.1117/12.2184265

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