9 July 2015 Photomasks for FPD
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Abstract
Continuous innovation of mobile devices such as smart phones provides new and better experiences for users. Such innovations demand for FPD (Flat Panel Display) to have higher resolution, a smarter design, a lighter weight, lower energy consumption, and many other improvements. Among those requirements, higher resolution is the most critical feature to achieve realistic images on the screen and to provide different user experiences. However, higher resolution LCD (Liquid Crystal Display) panels cannot be easily achieved simply by scaling and shrinking the process rule as has been historically done in the semiconductor industry. This is because an LCD panel is an optical device as well as being an electrically controlled integrated circuit. The important factors in fabricating an LCD panel as an optical device are discussed here in conjunction with the photo mask requirements.
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Yasuhiro Kanaya, Yasuhiro Kanaya, Tetsuya Iizuka, Tetsuya Iizuka, Takatoshi Tomooka, Takatoshi Tomooka, } "Photomasks for FPD", Proc. SPIE 9658, Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII, 965802 (9 July 2015); doi: 10.1117/12.2193581; https://doi.org/10.1117/12.2193581
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