Author Affiliations +
Christina Turley,1 Jed Rankin,1 Louis Kindt,1 Mark Lawliss,1 Luke Bolton,1 Kevin Collins,1 Lin Cheong,1 Ravi Bonam,1 Richard Poro,1 Takeshi Isogawa,2 Eisuke Narita,2 Masayuki Kagawa2
1IBM Corp. (United States)
2Toppan Photomasks, Inc. (United States)