Long Trace Profile Measurements On Cylindrical Aspheres

Peter Z Takacs; Su-chen Kate Feng; Eugene L. Church; Shi-nan Qian; Wu-ming Liu

doi:10.1117/12.948082

29 January 1989 Long Trace Profile Measurements On Cylindrical Aspheres

Peter Z Takacs, Su-chen Kate Feng, Eugene L. Church, Shi-nan Qian, Wu-ming Liu

Proceedings Volume 0966, Advances in Fabrication and Metrology for Optics and Large Optics; (1989) https://doi.org/10.1117/12.948082
Event: 32nd Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1988, San Diego, CA, United States

Abstract

A new long-trace optical profiling instrument is now in operation at Brookhaven National Laboratory measuring surface figure and macro-roughness on large optical components, principally long cylindrical mirrors for use in synchrotron radiation beam lines. The non-contact measurement technique is based upon a pencil-beam interferometer system. The optical head is mounted on a linear air bearing slide and has a free travel range of nearly one meter. We are able to sample surface spatial periods between 1 mm (the laser beam diameter) and 1 m. The input slope data is converted to surface height by a Fourier filtering technique which distributes the random noise error contributions evenly over the entire trace length. A number of optical components have been measured with the instrument. Results are presented for fused silica cylinders 900 mm and 600 mm in length and for a fused silica toroid and several electroless nickel-plated paraboloids.

Citation Download Citation

Peter Z Takacs, Su-chen Kate Feng, Eugene L. Church, Shi-nan Qian, and Wu-ming Liu "Long Trace Profile Measurements On Cylindrical Aspheres", Proc. SPIE 0966, Advances in Fabrication and Metrology for Optics and Large Optics, (29 January 1989); https://doi.org/10.1117/12.948082

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available