Paper
29 January 1989 Review Of Precision Surface Generating Processes And Their Potential Application To The Fabrication Of Large Optical Components
I. F. Stowers, R. Komanduri, E. D. Baird
Author Affiliations +
Abstract
Over the last decade a wide variety of processes applicable to ultraprecision contouring and polishing have evolved. Examples of these processes include float polishing, elastic emission machining, erosive jet, ion milling, plasma assisted chemical etching, and precision ductile grinding. These processes are reviewed with the intent of comparing their removal rates, resultant surface roughness, demonstrated contour accuracy, and applicability to the manufacture of large optical components. The incentive for this study is the evolution of a deterministic manufacturing process able to lower the cost of fabricating large precision optical components by an order of magnitude.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
I. F. Stowers, R. Komanduri, and E. D. Baird "Review Of Precision Surface Generating Processes And Their Potential Application To The Fabrication Of Large Optical Components", Proc. SPIE 0966, Advances in Fabrication and Metrology for Optics and Large Optics, (29 January 1989); https://doi.org/10.1117/12.948050
Lens.org Logo
CITATIONS
Cited by 16 scholarly publications and 4 patents.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Polishing

Abrasives

Surface roughness

Glasses

Surface finishing

Particles

Diamond

RELATED CONTENT

New approach for pre-polish grinding with low subsurface damage
Proceedings of SPIE (September 27 2011)
Sapphire fabrication for precision optics
Proceedings of SPIE (November 11 1996)
Finishing Tubular Diamond Turned Optics
Proceedings of SPIE (February 13 1987)
Superpolishing by a tin polisher
Proceedings of SPIE (October 29 1998)
Study on optimization of a NiP layer polishing process on...
Proceedings of SPIE (February 15 2022)

Back to Top