4 September 2015 SLM based semiconductor maskwriter
Author Affiliations +
Proceedings Volume 9661, 31st European Mask and Lithography Conference; 966104 (2015) https://doi.org/10.1117/12.2197024
Event: 31st European Mask and Lithography Conference, 2015, Eindhoven, Netherlands
The high-end semiconductor mask fabrication is dominated by e-beam technology. But still more than 50% of all semiconductor masks are produced by laser writers. The current laser writers are based on the same technology that was used 25 years ago. They are reliable and fast but not very economical. Heidelberg Instruments has developed a new economical and fast laser writer based on the latest technologies.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Steffen Diez, Steffen Diez, Achim Jehle, Achim Jehle, } "SLM based semiconductor maskwriter", Proc. SPIE 9661, 31st European Mask and Lithography Conference, 966104 (4 September 2015); doi: 10.1117/12.2197024; https://doi.org/10.1117/12.2197024

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