AutoAnalysis, the first application available for the FAVOR® platform, offers a solution to these problems by providing fully automated analysis of AIMS™ aerial images. Direct communication with the AIMS™ system allows automated data transfer and analysis parallel to the measurements. User defined report templates allow the relevant data to be output in a manner that can be tailored to various internal needs and support the requests of your customers. Productivity is significantly improved due to the fast analysis, operator time is saved and made available for other tasks and reliability is no longer a concern as the most defective region is always and consistently captured. In this paper the concept and approach of AutoAnalysis will be presented as well as an update to the status of the project. The benefits arising from the use of AutoAnalysis will be discussed in more detail and a study will be performed in order to demonstrate.
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Anthony Garetto, Thomas Rademacher, Kristian Schulz, "Productivity enhancement and reliability through AutoAnalysis," Proc. SPIE 9661, 31st European Mask and Lithography Conference, 96610M (4 September 2015);