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4 September 2015 Increasing efficiency and effectiveness of processes related to airborne particles in reticle mask environments
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Proceedings Volume 9661, 31st European Mask and Lithography Conference; 96610Y (2015) https://doi.org/10.1117/12.2209736
Event: 31st European Mask and Lithography Conference, 2015, Eindhoven, Netherlands
Abstract
There are significant advantages of using the ReticleSense™ Airborne Particle Sensor (APSR) in reticle environments to locate and troubleshoot airborne particles as compared to traditional surface scan reticle, in-situ or hand-held methods. Time, resource and cost savings are identified.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Allyn Jackson "Increasing efficiency and effectiveness of processes related to airborne particles in reticle mask environments", Proc. SPIE 9661, 31st European Mask and Lithography Conference, 96610Y (4 September 2015); https://doi.org/10.1117/12.2209736
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