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4 September 2015Increasing efficiency and effectiveness of processes related to airborne particles in reticle mask environments
There are significant advantages of using the ReticleSense™ Airborne Particle Sensor (APSR) in reticle environments to locate and troubleshoot airborne particles as compared to traditional surface scan reticle, in-situ or hand-held methods. Time, resource and cost savings are identified.
Allyn Jackson
"Increasing efficiency and effectiveness of processes related to airborne particles in reticle mask environments", Proc. SPIE 9661, 31st European Mask and Lithography Conference, 96610Y (4 September 2015); https://doi.org/10.1117/12.2209736
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Allyn Jackson, "Increasing efficiency and effectiveness of processes related to airborne particles in reticle mask environments," Proc. SPIE 9661, 31st European Mask and Lithography Conference, 96610Y (4 September 2015); https://doi.org/10.1117/12.2209736