6 November 2015 High order aspheric optical compensation system research
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Proceedings Volume 9667, International Workshop on Thin Films for Electronics, Electro-Optics, Energy, and Sensors; 96670G (2015) https://doi.org/10.1117/12.2199627
Event: International Workshop on Thin Films for Electronics, Electro-Optics, Energy and Sensors, 2015, Suzhou, China
Abstract
According to the characteristics of high order asphere[1] and relative aperture, in order to improve the detection accuracy, a new optical compensation system is designed in this paper. The compensation system introduces conic asphere as splitter surface, greatly reducing the difficulty of the assembly. The comparison between the test results and the data from the three-dimensional profiler of Taylor Hobson, shows that test results are reliable.
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Donghui Shen, Bin Xie, Liang Zong, Congyue Zhang, Lingling Yu, "High order aspheric optical compensation system research", Proc. SPIE 9667, International Workshop on Thin Films for Electronics, Electro-Optics, Energy, and Sensors, 96670G (6 November 2015); doi: 10.1117/12.2199627; https://doi.org/10.1117/12.2199627
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