22 December 2015 Calculation of the dynamic characteristics of micro-mirror element based on thermal micro-actuators
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Abstract
Paper presents a structure of a micro-mirror element driven by thermal micro-actuators. Micro-mirror dimensions are 100x100 um and it was manufactured by a surface micromachining using microelectronics technologies. Thermal microactuator is a bimorph structure consisting of aluminum and silicon dioxide layers with a polysilicon heater between them. The description of manufacturing process for micro-mirror element is given. The micro-mirror motion is achieved by passing an electric current through the heater. The actuator structure is heated and rotates the mirror. The processes of heating and cooling of thermal micro-actuator structure directly affects the characteristics of manufactured micro-mirror, thus the studying of these processes is essential. The report proposes a method for calculating the heating and cooling time, taking into account the influence of the structure geometry, electrical characteristics of external influence and the environment conditions. Also a method for the experimental determination of the dynamic characteristics is proposed, along with the method of electro-thermal analogy. The results of calculation are in good agreement with the experimental data, which allows one to use it to determine the dynamic characteristics of micro-devices based on thermal microactuators.
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Sergey S. Evstafyev, Sergey S. Evstafyev, Sergey P. Timoshenkov, Sergey P. Timoshenkov, Vyacheslav K. Samoilykov, Vyacheslav K. Samoilykov, Natalia E. Korobova, Natalia E. Korobova, Alexey S. Timoshenkov, Alexey S. Timoshenkov, Anatolij M. Tereshhenko, Anatolij M. Tereshhenko, } "Calculation of the dynamic characteristics of micro-mirror element based on thermal micro-actuators", Proc. SPIE 9668, Micro+Nano Materials, Devices, and Systems, 966823 (22 December 2015); doi: 10.1117/12.2202444; https://doi.org/10.1117/12.2202444
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