Design and simulation of piezoelectric PZT micro-actuators with integrated piezoresistive displacement sensors for micro-optics applications

Ssu-Han Chen; Aron Michael; Chee Yee Kwok; Peng Wang

doi:10.1117/12.2202502

22 December 2015 Design and simulation of piezoelectric PZT micro-actuators with integrated piezoresistive displacement sensors for micro-optics applications

Ssu-Han Chen, Aron Michael, Chee Yee Kwok, Peng Wang

Author Affiliations +

Proceedings Volume 9668, Micro+Nano Materials, Devices, and Systems; 96682C (2015) https://doi.org/10.1117/12.2202502
Event: SPIE Micro+Nano Materials, Devices, and Applications, 2015, Sydney, New South Wales, Australia

Abstract

This paper presents the design and simulation of a novel piezoelectric actuator integrated with on-chip piezoresistive sensors for micro-lens actuation. COMSOL Multiphysics is used to perform and facilitate the design and simulation. The actuator consists of eight d31 mode unimorph piezoelectric actuators symmetrically attached to a lens holding frame through springs at one end, and to the silicon substrate at the other end. Diffused p-Si piezoresistors with doping of 1x10¹⁸cm^-3 are considered in the proposed design for displacement sensing of each micro-actuator. Results shows 3.2μm/V displacement sensitivity for the micro-lens actuator and piezoresistive sensitivity of 0.134mV/V/μm is obtainable with p-Si piezoresistors.

Citation Download Citation

Ssu-Han Chen, Aron Michael, Chee Yee Kwok, and Peng Wang "Design and simulation of piezoelectric PZT micro-actuators with integrated piezoresistive displacement sensors for micro-optics applications", Proc. SPIE 9668, Micro+Nano Materials, Devices, and Systems, 96682C (22 December 2015); https://doi.org/10.1117/12.2202502

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