Optical properties of refractory TiN, AlN and (Ti,Al)N coatings

M. Bilokur; A. Gentle; M. Arnold; M. B. Cortie; G. B. Smith

doi:10.1117/12.2202403

22 December 2015 Optical properties of refractory TiN, AlN and (Ti,Al)N coatings

M. Bilokur, A. Gentle, M. Arnold, M. B. Cortie, G. B. Smith

Proceedings Volume 9668, Micro+Nano Materials, Devices, and Systems; 96685O (2015) https://doi.org/10.1117/12.2202403
Event: SPIE Micro+Nano Materials, Devices, and Applications, 2015, Sydney, New South Wales, Australia

Abstract

Titanium nitride is a golden-colored semiconductor with metallic optical properties. It is already widely used in room temperature spectrally-selective coatings. In contrast, aluminum nitride is a relatively wide-band gap, non-metallic material. Both nitrides have exceptional thermal stability, to over 1000 °C, but are susceptible to oxidation. We will show here that composite coatings consisting of these materials and their complex oxides have considerable potential for spectrally-selective applications, including at elevated temperatures. In particular, we examine the metastable materials produced by magnetron sputtering. The effective dielectric functions of these materials can be tuned over a wide range by manipulation of their microstructure. This provides a strategy to assemble materials with tunable dielectric functions using a 'bottom-up' approach. The results are compared to those achievable by conventional, 'top-down', planar optical stacks comprised of alternating layers of TiN_x and AlN.

Citation Download Citation

M. Bilokur, A. Gentle, M. Arnold, M. B. Cortie, and G. B. Smith "Optical properties of refractory TiN, AlN and (Ti,Al)N coatings", Proc. SPIE 9668, Micro+Nano Materials, Devices, and Systems, 96685O (22 December 2015); https://doi.org/10.1117/12.2202403

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