15 October 2015 Circle parameters calibration and data analysis of two-dimensional shape photomask
Author Affiliations +
Two-dimensional shape photomask is widely used to calibrate and correct optical precision measurement system like image measurement instrument and to calibrate or distortion correction of camera probe with CCD/CMOS sensor. Among all 2-D shapes, circle is adopted frequently because of its information such as size, form and position. Standard photomask with circle shape is multi-parameter calibrated by high precision laser two-coordinate standard device based on coordinate measurement method. Roundness error is assessed by least square circle method. How center coordinate, radius and roundness of a circle affected by number of measurement points, incident light intensity and optical magnification of micro probe are analyzed. Test results indicate than that standard with circle shape could be calibrated with high precision.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shuanghua Sun, Zi Xue, Heyan Wang, "Circle parameters calibration and data analysis of two-dimensional shape photomask", Proc. SPIE 9672, AOPC 2015: Advanced Display Technology; and Micro/Nano Optical Imaging Technologies and Applications, 96720Z (15 October 2015); doi: 10.1117/12.2202906; https://doi.org/10.1117/12.2202906


Roundness measuring instrument for 2-dimensional standards
Proceedings of SPIE (October 10 2013)
High precision calibration for 2D optical standard
Proceedings of SPIE (October 15 2012)
International photomask linewidth comparison by NIST and PTB
Proceedings of SPIE (October 17 2008)
Updated NIST photomask linewidth standard
Proceedings of SPIE (June 02 2003)
Calibration of phase-shift interferometer
Proceedings of SPIE (October 20 1992)

Back to Top