15 October 2015 Integrated Bragg grating filter in ultra-thin silicon-on-insulator strip waveguides
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Abstract
We demonstrate an integrated Bragg grating filter using 60-nm-thick silicon-on-insulator strip waveguides. The ultrathin waveguides exhibit a propagation loss of 0.61 dB/cm. Upon thinning-down, the waveguide effective refractive index is reduced, making the fabrication of Bragg grating filter possible using the standard 248-nm deep ultra-violet (DUV) photolithography process. The Bragg grating filter exhibits a stopband width of 1 nm and an extinction ratio of 31 dB.
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Zhi Zou, Zhi Zou, Linjie Zhou, Linjie Zhou, Jianping Chen, Jianping Chen, } "Integrated Bragg grating filter in ultra-thin silicon-on-insulator strip waveguides", Proc. SPIE 9673, AOPC 2015: Micro/Nano Optical Manufacturing Technologies; and Laser Processing and Rapid Prototyping Techniques, 96730J (15 October 2015); doi: 10.1117/12.2199171; https://doi.org/10.1117/12.2199171
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