Research on the implementation method of the fine subdivision of grating sensor signal

Bo Liu; Haixia Gao; Xinghua Qi; Che Liu

doi:10.1117/12.2199176

15 October 2015 Research on the implementation method of the fine subdivision of grating sensor signal

Bo Liu, Haixia Gao, Xinghua Qi, Che Liu

Proceedings Volume 9673, AOPC 2015: Micro/Nano Optical Manufacturing Technologies; and Laser Processing and Rapid Prototyping Techniques; 96730K (2015) https://doi.org/10.1117/12.2199176
Event: Applied Optics and Photonics China (AOPC2015), 2015, Beijing, China

Abstract

Precision measurement technology is the important measure of a nation's industrial technology level. However, with the rapid development of modern science and technology, metrological grating directly used for displacement measurement has could not meet the needs of contemporary people to the accuracy of measurement. So it is necessary to subdivide the grating sensor signal, especially the fine subdivision which has been increasingly concerned. Aiming at the constructor method used in the specific implementation process of the fine subdivision of the grating sensor signal, two schemes are put forward in this paper. Based on the analysis and comparison of the two methods, at last, the optimal design scheme will be determined.

Citation Download Citation

Bo Liu, Haixia Gao, Xinghua Qi, and Che Liu "Research on the implementation method of the fine subdivision of grating sensor signal", Proc. SPIE 9673, AOPC 2015: Micro/Nano Optical Manufacturing Technologies; and Laser Processing and Rapid Prototyping Techniques, 96730K (15 October 2015); https://doi.org/10.1117/12.2199176

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