A highly-sensitive NaCl concentration sensor based on a compact silicon-on-insulator micro-ring resonator

Jie Zhou; Wanjun Wang; Yiqun Wang; Junbo Feng; Jin Guo

doi:10.1117/12.2201034

15 October 2015 A highly-sensitive NaCl concentration sensor based on a compact silicon-on-insulator micro-ring resonator

Jie Zhou, Wanjun Wang, Yiqun Wang, Junbo Feng, Jin Guo

Author Affiliations +

Proceedings Volume 9674, AOPC 2015: Optical and Optoelectronic Sensing and Imaging Technology; 96742F (2015) https://doi.org/10.1117/12.2201034
Event: Applied Optics and Photonics China (AOPC2015), 2015, Beijing, China

Abstract

Silicon photonics circuit has been widely investigated in recent years, due to its advantage in the small footprint, high density integration and compatible with CMOS pilot line. In this paper, a compact, highly-sensitivity NaCl concentration sensor is experimentally demonstrated, based on the micro-ring resonators. The sensor circuit is composed of grating couplers, bus waveguide and micro-ring resonators. The width of optical waveguides is 450nm, with a thickness of 220nm. The chip was fabricated in imec through the ePIXfab multi-project wafer service supported by our group, which is compatible with the CMOS process line. The chip shows high sensitivity, as high as of more than 80nm/RIU, which corresponding to a detection limit of 1.6e^-4 by using optical spectrum analyzer.

Citation Download Citation

Jie Zhou, Wanjun Wang, Yiqun Wang, Junbo Feng, and Jin Guo "A highly-sensitive NaCl concentration sensor based on a compact silicon-on-insulator micro-ring resonator", Proc. SPIE 9674, AOPC 2015: Optical and Optoelectronic Sensing and Imaging Technology, 96742F (15 October 2015); https://doi.org/10.1117/12.2201034

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