8 October 2015 Laser measurement and analysis of reposition error in polishing systems
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Proceedings Volume 9677, AOPC 2015: Optical Test, Measurement, and Equipment; 96770X (2015) https://doi.org/10.1117/12.2199246
Event: Applied Optics and Photonics China (AOPC2015), 2015, Beijing, China
Abstract
In this paper, robotic reposition error measurement method based on laser interference remote positioning is presented, the geometric error is analyzed in the polishing system based on robot and the mathematical model of the tilt error is presented. Studies show that less than 1 mm error is mainly caused by the tilt error with small incident angle. Marking spot position with interference fringe enhances greatly the error measurement precision, the measurement precision of tilt error can reach 5 um. Measurement results show that reposition error of the polishing system is mainly from the tilt error caused by the motor A, repositioning precision is greatly increased after polishing system improvement. The measurement method has important applications in the actual error measurement with low cost, simple operation.
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Weisen Liu, Weisen Liu, Junhua Wang, Junhua Wang, Min Xu, Min Xu, Xiaoying He, Xiaoying He, } "Laser measurement and analysis of reposition error in polishing systems", Proc. SPIE 9677, AOPC 2015: Optical Test, Measurement, and Equipment, 96770X (8 October 2015); doi: 10.1117/12.2199246; https://doi.org/10.1117/12.2199246
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