White light phase-stepping interferometry based on insensitive algorithm to periodic systematic error

Ningfang Song; Jiao Li; Huipeng Li; Xinkai Luo

doi:10.1117/12.2199617

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8 October 2015 White light phase-stepping interferometry based on insensitive algorithm to periodic systematic error

Ningfang Song; Jiao Li; Huipeng Li; Xinkai Luo

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Proceedings Volume 9677, AOPC 2015: Optical Test, Measurement, and Equipment; 967717 (2015) https://doi.org/10.1117/12.2199617
Event: Applied Optics and Photonics China (AOPC2015), 2015, Beijing, China

Abstract

Periodic systematic error caused by erroneous reference phase adjustments and instabilities of interferometer has a great influence on precision of measurement micro-profile using white light phase-stepping interferometry. This paper presents a five-frame algorithm that is insensitive to periodic systematic error. This algorithm attempts to eliminate the periodic systematic error when calculating the phase. Both theoretical and experimental results show that the proposed algorithm has good immunity to periodic systematic error and is able to accurately recover the 3D profile of a sample.

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Ningfang Song, Jiao Li, Huipeng Li, and Xinkai Luo "White light phase-stepping interferometry based on insensitive algorithm to periodic systematic error", Proc. SPIE 9677, AOPC 2015: Optical Test, Measurement, and Equipment, 967717 (8 October 2015); https://doi.org/10.1117/12.2199617